Output details
15 - General Engineering
University of Huddersfield
Comparison study of algorithms and accuracy in the wavelength scanning interferometry
This paper critically discusses the accuracy of algorithms and their effects on the surface measurement using wavelength scanning interferometry (WSI). The research in this paper is used as a baseline for a prototype WSI which currently employed in a European program (NanoMend NMP4-LA-2011-280518(PI L Blunt) and being exploited under patent IBSPE (Netherlands) for on-line detection of nano scale defects. One of these algorithms has been led to further developments in surface metrology as reported in the publication: Gao, Muhamedsalih, and Jiang, Xiang: 'Surface and thickness measurement of a transparent film using ',Optics Express, Vol.20, Issue 19, pp. 21450-21456 (2012)