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Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis

This paper presents an application of segmentation analysis, (as pioneered by Scot) to the field of metrology for micro-parts. In these type of applications conventional coordinate metrology is not applicable due to probe size and force. Here, surface metrology instrumentation is used to measure the largely planar specimens. The surface point cloud is mathematically interrogated using suitable algorithms and the boundaries of geometrical feature are defined. The work is based in the research of the SURFSTAND project (PI L Blunt). This project established the basic rules for surface segmentation and directly resulted in the ISO 25178 series of standards.