Output details
15 - General Engineering
University of Huddersfield
Surface Measurement Errors using Commercial Scanning White Light Interferometers
This paper has become one of the most cited papers (67 times since 2008) in the field of surface metrology in recent years. It reported systematic errors that are observed when the surface gradient is considerably smaller and which initial the discovery of the physics limitation of the scanning white light interferometry and attracted more researches in this research topic. This approach to understanding high sloped surface has led to research being initiated at NPL and has impacted directly into the FP7 project NanoMend NMP4-LA-2011-280518(PI Blunt), concerning in-process metrology and repair for large substrate area structured surfaces.