Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Surrey
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Article title
Sub-ångstrom Experimental Validation of Molecular Dynamics for Predictive Modeling of Extended Defect Structures in Si
Type
D - Journal article
Title of journal
Physical Review Letters
Article number
166102
Volume number
110
Issue number
16
First page of article
-
ISSN of journal
1079-7114
Year of publication
2013
URL
-
Number of additional authors
-
Additional information
The semiconductor industry is driven by ever decreasing device dimensions, integration complexities and costs. Virtual device process and simulation is required for design of next generation semiconductor devices. This paper validates atomistic simulation techniques suitable for advanced chip manufacture and brings together groups from different continents to work in this area. The work has laid the foundations for a number of invited talks and the creation of a new ion implantation facility in Canada (Prof. Knights).
Interdisciplinary
-
Cross-referral requested
-
Research group
None
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
