Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Ulster
Acetylene–argon plasmas measured at a biased substrate electrode for diamond-like carbon deposition: I. Mass spectrometry
Part funded by Seagate Ltd, this is the first of a two part investigation (see dx.doi.org/10.1088/0963-0252/20/1/015004) into the relationship between plasma neutral and ionic species and their impact on the plasma enhanced growth of thin film materials. This is the first report where the mass spectrometry and ion energy analysis was integrated into the high voltage RF substrate electrode to obtain true measurements in an industrially relevant film growth environment. This work reflects ongoing collaboration with Seagate into carbon materials and plasma processes and also development of commercial biomedical coatings (e.g. US patent 6,638,569).
