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13 - Electrical and Electronic Engineering, Metallurgy and Materials
Open University
Fluorine codoping in germanium to suppress donor diffusion and deactivation
Computational models of defect engineering strategies to retard donor atom diffusion and deactivation in Ge were developed to address a key problem in the creation of n-type Germanium-Metal Oxide Semiconductor Field Effect Transistors (Ge-MOSFETs). Our theoretical prediction that fluorine co-doping in germanium can suppress donor diffusion and deactivation was validated experimentally, 2 years later, by Impellizzeri et al. (J. Appl. Phys. 109, 113527 (2011)), following which the leading semiconductors group of Saraswat at Stanford Univ. (Appl. Phys. Lett. 101, 072104 (2012)) has claimed that it leads to significant improvements in the performance of Ge-MOSFETs.