Output details
15 - General Engineering
University of Cambridge
Article title
High-quality micromachining of silicon at 1064 nm using a high-brightness MOPA-based 20-W Yb fiber laser
Type
D - Journal article
Title of journal
IEEE Journal of Selected Topics in Quantum Electronics
Article number
-
Volume number
15
Issue number
2
First page of article
462
ISSN of journal
1077-260X
Year of publication
2009
URL
-
Number of additional authors
1
Additional information
This first report on the interaction of Si with short pulse Yb fibre lasers at 1 micron wavelength opens up the potential of a fivefold cost reduction in the use of 1um precision lasers for Si processing, and has led to a new laser product from SPI lasers, the GS4 MOPA Laser. (Industrial Contact: ID_in_audit_file@spilasers.com).
Interdisciplinary
-
Cross-referral requested
-
Research group
None
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
