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Internal electrical and mechanical phase inversion for coupled resonator array MEMS filters

The paper reports high performance MEMS filters using new internal mechanical and electrical phase inversions with novel topologies of resonators and coupled arrays, which consolidate the collaboration with industrial partners and achieved a significant contribution in kind from NXP Semiconductor (GBP236k) and itmsoil Ltd (GBP250k), quoted as collateral in the recently granted CSIC (Cambridge Centre for Smart Infrastructure and Construction) proposal: "Low power MEMS strain sensors for infrastructure monitoring" (GBP273k, funded by EPSRC/TSB). This work links with a series of papers in top conferences such as IEEE-MEMS-2008, IEEE-IFCS-2007 (nominated for best student paper award), IEEE-IUS-2008 and Transducers-2009.