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9 - Physics

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Article title

Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness

Type

D - Journal article

DOI

Title of journal

Applied Surface Science

Article number

Volume number

281

Issue number

First page of article

ISSN of journal

0169-4332

Year of publication

2013

URL

Number of additional authors

Additional information

Interdisciplinary

Cross-referral requested

Research group

A - Accelerator Applications Group

Citation count

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract