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15 - General Engineering

University of Edinburgh (joint submission with Heriot-Watt University)

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Article title

Fabrication and Measurement of Test Structures to Monitor Stress in SU-8 Films

Type

D - Journal article

DOI

10.1109/TSM.2012.2202797

Title of journal

IEEE Transactions on Semiconductor Manufacturing

Article number

Volume number

Issue number

First page of article

346

ISSN of journal

0894-6507

Year of publication

2012

URL

Number of additional authors

Additional information

This is a key output from an industrially funded project (£1M, National Semiconductor-TI), which is developing thick electroplated metal features for micro-scale magnetic components, such as inductors. This invited paper, extending earlier IEEE ICMTS 2010 (DoI:10.1109/ICMTS.2010.5466870), presents, for the first time, measurements of structures fabricated in the thick photoresist SU-8. This has resulted in 3 further PhD studies, one of which is 50% funded by TI, and another by the Smart Microsystems Flagship project FS/01/02/10 (EPSRC £1.5M) with industrial contributions from 7 multinationals (£1.4M), all within ERPE. The work has been extended in IEEE ICMTS 2013 (DoI:10.1109/ICMTS.2013.6528137)

Interdisciplinary

Cross-referral requested

Research group

A - Manufacturing & Materials

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract