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15 - General Engineering

University of Edinburgh (joint submission with Heriot-Watt University)

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Output 109 of 305 in the submission

Article title

Electrothermally Actuated Silicon Carbide Tunable MEMS Resonators

Type

D - Journal article

DOI

10.1109/JMEMS.2012.2189357

Title of journal

Journal of Microelectromechanical Systems

Article number

Volume number

Issue number

First page of article

811

ISSN of journal

1057-7157

Year of publication

2012

URL

http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=06172638

Number of additional authors

Additional information

This paper showed that electrothermal coarse- and fine-tuning using various device geometries and electrode designs can set and trim the frequency of a wide range of MEMS resonators. The work was supported by EPSRC (GR/T06322/01) and Scottish Enterprise Proof-of-Concept (£1.5M) and is underpinned by the 2008 US Patent Award 7468324. This work was developed to enable electrical sensing in SiC based flexural resonators, driven by integrated PZT sensors (DoI:10.1109/LED.2011.2177513). Elements of fabrication processes developed in this paper facilitated the inclusion of MEMS integration with industrial silicon carbide IC technology in the Smart Microsystems Flagship projectFS/01/02/10 (EPSRC £1.5M) (www.lboro.ac.uk/research/iemrc/projectp2new.html).

Interdisciplinary

Cross-referral requested

Research group

A - Manufacturing & Materials

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract