Output details
11 - Computer Science and Informatics
University of Greenwich
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Article title
Modelling and optimisation study on the fabrication of nano-structures using imprint forming process
Type
D - Journal article
Title of journal
Engineering Computations
Article number
-
Volume number
28
Issue number
1
First page of article
93
ISSN of journal
0264-4401
Year of publication
2011
Number of additional authors
5
Additional information
This work delivered new knowledge on process related parameters for Focused Ion Beam and Nano-Imprint Forming and their control to a consortium of 20+ companies through EPSRC Grand Challenge. The originality of this work is in the novel model based tools for process control that have been developed, tested and validated using state-of-art equipment at Cranfield University. The process control tool has been adopted on a FEI200 system and proved to offer supreme accuracy in fabrication of nanostructures that was not possible to achieve with previous control systems.
Interdisciplinary
-
Cross-referral requested
-
Research group
1 - Computational Mechanics & Reliability Group
Citation count
2
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
