Output details
15 - General Engineering
University of Huddersfield
Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise
This paper introduces a novel optical interferometry system with self-calibration for fast full-field measurement of micro and nano-scale surfaces (both smooth and with large aspect ratios). The system can be used for on-line/in-process/in-situ measurement on the shop floor. The project is sponsored by EPSRC grant EP/I033491/1. A patent WO2010/082066 was issued; three prototype instruments developed and will be applied to Catapult CPI photo-voltaics manufacturing-system and the NPL national measurement system. A PhD degree resulted from this research and the candidate awarded one of the five Postgraduate Awards 2012 by the Worshipful Company of Scientific Instrument Makers.