Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
Queen's University Belfast
Article title
CMOS compatible RF MEMS switches with serpentine springs
Type
D - Journal article
Title of journal
ECS Transactions
Article number
-
Volume number
18
Issue number
1
First page of article
9
ISSN of journal
1938-5862
Year of publication
2009
URL
-
Number of additional authors
7
Additional information
Micromachined RF components have become increasingly important in radio communication systems due to their low loss, high isolation and low power consumption. Integration of such devices with CMOS offers considerable system level benefits but presents considerable challenge due to materials and fabrication process issues. This paper describes a novel CMOS compatible technology that was developed to produce a MEMS switch structure with excellent switching performance. The technology has the potential to enable MEMS devices to be incorporated in a wider range of products.
Interdisciplinary
-
Cross-referral requested
-
Research group
A - High Frequency Electronics (HFE)
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
