Output details
15 - General Engineering
University of Durham
Article title
Manipulation of exposure dose parameters to improve production of high aspect ratio structures using SU-8
Type
D - Journal article
Title of journal
Journal of Micromechanics and Microengineering
Article number
075016
Volume number
22
Issue number
7
First page of article
-
ISSN of journal
0960-1317
Year of publication
2012
Number of additional authors
2
Additional information
This work combines experience from Wood's output 4 (Solano et al.), together with new work funded by the RF080137 KTA award mentioned, examined from a ‘Chemistry of the Engineering’ perspective. We are convinced it will lead on to new application areas for the microgripper and its main functional material, SU-8.
Interdisciplinary
-
Cross-referral requested
-
Research group
B - Electronics Research Group
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
