Output details

Real-time cross-correlation filtering of a one-dimensional grating position-encoded signal

This output reports on-line and real-time signal filtering technique based on a cross-correlation filter which can be employed for real-time filtering 1D grating position-encoded displacement signals for the displacement measurement made using atomic force microscope (AFM) cantilevers. The cantilevers were used as encoders an were used for pitch evaluation of a nano-scale 1D arbitrary grating structure. The method described in this paper is planned be adopted by ISO standard in new revised version: ISO/DIS 11952 Surface chemical analysis — Scanning probe microscopy —Determination of geometric quantities using SPM: Calibration of measuring systems. This paper represents my outstanding contribution to nanometrology.