Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
Bangor University
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Article title
Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes
Type
D - Journal article
Title of journal
IEEE Transactions on Microwave Theory and Techniques
Article number
-
Volume number
57
Issue number
12
First page of article
3262
ISSN of journal
1557-9670
Year of publication
2009
URL
-
Number of additional authors
10
Additional information
This article reports the first utilization of a refractive metal as the mechanical membrane material of a RF MEMS capacitive switch. The measured performance shows enhancement of the overall thermal stability with respect to ambient temperature variations due to proper thermal match between substrate and suspended membrane. This work helped MEMtronics Corp. (USA) gain of order $ 3M funding on extensions of DARPA contracts HR001-06-1-0046 and N66001-10-1-4006 ( 2010- 2013).
Interdisciplinary
-
Cross-referral requested
-
Research group
None
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-