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15 - General Engineering

University of Cambridge

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Article title

Maskless photolithography via holographic optical projection

Type

D - Journal article

DOI

10.1364/OL.35.002230

Title of journal

Optics Letters

Article number

Volume number

Issue number

First page of article

2230

ISSN of journal

1539-4794

Year of publication

2010

URL

Number of additional authors

Additional information

Research resulted in invited talk at Photon10 and was featured in Laser Focus World, Aug, 2010. Holographic projection has been commercialised by BAE Systems (Jon Freeman, ID_in_audit_file@baesystems.com), ALPS/Two Trees Photonics (Jamie Christmas, ID_in_audit_file@twotreesphotonics.com) and exploited by Light Blue Optics (N. Lawrence, ID_in_audit_file@lightblueoptics.com). Metrology work continued as part of the IFM CIM Ultra-Precision (EP/I033491/1 GBP400k for this element out of total grant of GBP6M, 06 Oct 2011) and in industrial Evision project (GBP40k RG66144, 01-Jul-2012 ). Research was featured on 'Jack and the Genetically Modified Beanstalk' programme - Radio 4, 24th December 2011 http://www.bbc.co.uk/programmes/b018ft4x.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract