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15 - General Engineering

University of Huddersfield

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Article title

Comparison study of algorithms and accuracy in the wavelength scanning interferometry

Type

D - Journal article

DOI

10.1364/AO.51.008854

Title of journal

Applied Optics

Article number

Volume number

Issue number

First page of article

8854

ISSN of journal

0003-6935

Year of publication

2012

URL

http://dx.doi.org/10.1364/AO.51.008854

Number of additional authors

Additional information

This paper critically discusses the accuracy of algorithms and their effects on the surface measurement using wavelength scanning interferometry (WSI). The research in this paper is used as a baseline for a prototype WSI which currently employed in a European program (NanoMend NMP4-LA-2011-280518(PI L Blunt) and being exploited under patent IBSPE (Netherlands) for on-line detection of nano scale defects. One of these algorithms has been led to further developments in surface metrology as reported in the publication: Gao, Muhamedsalih, and Jiang, Xiang: 'Surface and thickness measurement of a transparent film using ',Optics Express, Vol.20, Issue 19, pp. 21450-21456 (2012)

Interdisciplinary

Yes

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract