Output details
15 - General Engineering
University of Huddersfield
Surface and thickness measurement of a transparent film using wavelength scanning interferometry
In this paper a wavelength scanning interferometer for measuring the surface and thickness of a transparent film has been reported. This paper represents a method that can effectively separate the interference signals between the different surfaces of the films was presented. A high quality publication of the author it was published on Optical Express. This research extended the applications of wavelength scanning interferometry from surface measurement to inspection into film thickness measurement. It paved in for the new EPSRC project EP/K007068/1(PI Gao) It has additionally become a part of fundamental impact element of the FP7 project NanoMend NMP4-LA-2011-280518(PI Blunt)