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15 - General Engineering

University of Cambridge

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Article title

Enhancing parametric sensitivity in electrically coupled MEMS resonators

Type

D - Journal article

DOI

10.1109/JMEMS.2009.2025999

Title of journal

Journal of Microelectromechanical Systems

Article number

Volume number

Issue number

First page of article

1077

ISSN of journal

1057-7157

Year of publication

2009

URL

http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=84

Number of additional authors

Additional information

The new mechanical sensing paradigm for MEMS devices introduced in this paper led to two related patent applications filed by Cambridge Enterprise (Application numbers PCT/GB2011/000805 and PCT/GB2012/052891) and technology translation is being pursued. The ongoing translation activity was highlighted in news releases (for example http://www.praxisunico.org.uk/news/member-detail.asp?ItemID=616) and an article in The Engineer (http://www.theengineer.co.uk/news/researchers-develop-ultra-sensitive-motion-sensors/1006538.article). The first author was awarded the best student paper award for a related conference paper presented at the 2009 IEEE International Frequency Control Symposium. The first author joined BP in April 2013 to progress translation of the technology (contact Dr Tony Espie, BP Alternative Energy).

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract