Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Birmingham : A - Electronic, Electrical and computer engineering
WR-3 band waveguides and filters fabricated using SU8 photoresist micromachining technology
Metal waveguides are the cornerstone of microwave systems at frequencies above about 8 GHz. As frequency increases they become more difficult and expensive to fabricate using conventional metal milling techniques. This paper presents the first development of a micromachined waveguide which has losses similar to normal metals. The detailed work on the micromachined process opens up a new practical technology for passive circuits and system packaging in the terahertz frequency range. This EPSRC (£1.5M) supported work also demonstrates a high performance dual-band filter at 300 GHz with an accurate connection to the 432 by 864 micron waveguide.