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The use of areal surface topography analysis for the inspection of micro-fabricated thin foil laser targets for ion acceleration

This paper proposed a novel approach to the characterization of critical dimensions of micro-fabricated thin foil laser targets used in the laser fusion research. The approach is based on acquiring areal maps and processing the surface topography data with novel merging algorithms. This approach in collaboration with Rutherford Appleton STFC Lab allows fast quantitative dimensional measurement. Its importance, relevance and timeliness are evinced by the fact that this approach is the first stage of in-process metrology for laser fusion targets. Additionally the metrology company Amatek Taylor Hobson has incorporated elements of the outcome into their commercial software; Talymap (case study).