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Output details

15 - General Engineering

University of Plymouth

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Output 2 of 68 in the submission

Article title

3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS

Type

D - Journal article

DOI

10.1007/s00542-011-1362-3

Title of journal

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Article number

Volume number

Issue number

First page of article

1763

ISSN of journal

0946-7076

Year of publication

2011

URL

http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=000297161300009&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=11bb513d99f797142bcfeffcc58ea008

Number of additional authors

Additional information

This was an outcome of an EPSRC/IDB Technologies Ltd (Ian Burnett, ian@idbtechnologies.co.uk) CASE studentship. The projected helped the company to understand the requirements of a new micro-systems market. The paper presented the design, fabrication and testing of silicon micromirrors for force sensing in BioMEMS. The underlying science of crystallographic etching was clearly presented. The micro fabrication and test methodologies described were valid for a wide range of microsystems that require flexural force sensing function and will benefit microsystem designers, manufacturers and end users. A poster based on this paper received the Best Poster Award on UK Semiconductor 2011 Conference.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract