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Output details

15 - General Engineering

University of Glasgow

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Article title

Batch fabricated dual cantilever resistive probe for scanning thermal microscopy

Type
D - Journal article
Title of journal
Microelectronic Engineering
Article number
-
Volume number
88
Issue number
8
First page of article
2435
ISSN of journal
0167-9317
Year of publication
2011
URL
-
Number of additional authors
2
Additional information

The thermal properties of nano-materials differ from the bulk and dominate the performance of modern devices. Scanning Thermal Microscopy (SThM) allows accurate thermometry at the nano-scale but the accurate measurement of thermal conductivity requires the provision of a known heat source close to the thermometer. Using two or more SThM probes, monolithically co-fabricated at separations down to 300nm, the temperature rise resulting from the local injection of heat, and hence the thermal conductivity, may be determined accurately. The work led to an invited plenary talk (TFNT 2012, Linz, Austria) and significant funding (EU FP7 MORGaN/QUANTIHEAT €294k/€823k, EPSRC EP/J010774/1, £563k).

Interdisciplinary
-
Cross-referral requested
-
Research group
A - Electronics & Nanoscale Engineering
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-