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15 - General Engineering
University of Glasgow
Aperiodic interferometer for six degrees of freedom position measurement
Interferometry is the gold standard of positional metrology. However, conventional single interferometers can only measure a maximum of two degrees of freedom. We introduce an entirely new form of interferometry that can simultaneously measure position in six degrees of freedom (x,y,z axes and rotation around each) with nanometre and micro-degree precision. These claims were verified by the National Physical Laboratory. The intellectual property behind this paper has been protected with patents (granted UK, international PCT/GB2009/002071: filings in Europe, China, Japan and US). A licence has been agreed and a start-up enterprise is being set up to exploit this work.