Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Strathclyde
Determination of the anisotropy of Young's modulus using a coupled microcantilever array
A collaborative grant (2007-09) to Strathclyde University, Heriot Watt University and the Institute of Systems Level Integration (operating until 2012) awarded by Scottish Enterprise (SE) underpinned the research. The aim of the SE grant was to intensify academic/industrial research and knowledge exchange with Semefab Ltd, a Scottish MEMS manufacturer. Novel MEMS test structures for material characterisation, such as the wagon-wheel structure of this paper, were developed by the research team, and these were used to analyse the mechanical characteristics of Semefab’s polysilicon/single crystal silicon materials used in their MEMS manufacturing processes [Managing Director, Semefab Ltd: allan.james@semefab.com].
