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13 - Electrical and Electronic Engineering, Metallurgy and Materials
University College London
Focused Ion Beam NanoSQUIDs as Novel NEMS Resonator Readouts
Nano Electromechanical Systems (NEMS) have emerged from industrial demand to shrink MEMS. NEMS resonators offer single mass/molecule detection capability if their displacement can be measured with sub-pm resolution. This paper (with NPL) showed this could be achieved with an integrated nanoSQUID and was one of the first on NEMS metrology. It led to further NPL collaboration (2nd IEEE paper in 2013) and work presented at the major applied superconductivity conference (ASC2010/12). The concept is being exploited as part of an NPL-led EU Metrology Programme (2012-) and led to NPL co-funding a PhD studentship at UCL (£32k, 2013-16, contact Ling Hao).