Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Southampton
Focused helium ion beam milling and deposition
Significance of output:
This paper established that the new He+ based Zeiss ‘Orion’ microscope can be used as a novel nanofabrication system. Our’s was the first in the world to be fully equipped in clean room conditions, representing a major technical challenge. Imaging resolution to 0.3nm was retained, whilst graphene milling and platinum and tungsten contact-forming deposition were demonstrated. Graphene milling results are much better than those from traditional Ga:FIB instruments and the techniques we have described led to devices with world record on/off ratios. Use of He+ beams is now rapidly expanding with ~15 installed and additional manufacturers entering the field.