You are in : Home » Results & submissions » Select UOA » 13 - Electrical and Electronic Engineering, Metallurgy and Materials » View submission: University of Southampton » Outputs » Detail

Output details

13 - Electrical and Electronic Engineering, Metallurgy and Materials

University of Southampton

Return to search Previous output Next output

Output 111 of 326 in the submission

Article title

Fabrication of MEMS components using ultra fine grained aluminium

Type

D - Journal article

DOI

10.1088/0960-1317/20/4/045029

Title of journal

Journal of Micromechanics and Microengineering

Article number

Volume number

Issue number

First page of article

045029

ISSN of journal

0960-1317

Year of publication

2010

URL

http://www.eprints.soton.ac.uk/270883

Number of additional authors

Additional information

Significance of output:

This paper describes a process for the fabrication of microelectromechanical systems (MEMS) using a novel embossing process, that produces features with dimensions smaller than 10 µm and high thermal conductivity. The hot embossing process (at 300C) allowed a reduced embossing force to be used and the microdevices thereby produced demonstrated the utility of the approach.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract