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13 - Electrical and Electronic Engineering, Metallurgy and Materials

University of Oxford

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Output 14 of 136 in the submission

Article title

Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope

Type

D - Journal article

DOI

10.1016/j.ultramic.2010.10.012

Title of journal

Ultramicroscopy

Article number

Volume number

111

Issue number

First page of article

877

ISSN of journal

0304-3991

Year of publication

2011

URL

Number of additional authors

Additional information

This work on the theory and experimental methods relating to confocal imaging in the TEM involved experimental groups from Oxford and Tokyo and theorists from Melbourne. The variant of the confocal geometry reported enables nanometer scale depth information to be retrieved in an alternative manner to tomography. The method can measure the thickness of buried crystalline regions in thick samples, which has attracted £130k funding from Intel for work on CMOS specimens. The work has been the topic of invited presentations by three of the authors at international conferences.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract