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13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Plymouth
Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures.
Thin films used as micro or nano actuators must be fully characterised and optimised, to realise the full potential of MEMS and NEMS devices. This paper reports on processes devised to provide total film and device characterisation, culminating in a simple, innovative system for measuring optically the out-of-plane piezoelectric film expansion. Prior to this work, a sophisticated setup within a totally noise-free environment was required. Subsequently, this research has been used by others, to develop measurement systems [Wang et al, J.Phy D App.Phys.Vol:41(3)], eliminating the need for artefacts that make this measurement so difficult to achieve.
