Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Plymouth
On the influence of the top and bottom electrodes - A comparative study between Pt and LNO electrodes for PZT thin films
It has long been known that the quality of ferroelectric film depends on the substrate and lower electrode that the film is grown on. LNO, as a top and bottom electrode, significantly extends the performance of PZT thin films. This paper presents our novel approach to designing MEMS devices, improving their dynamic capability, whilst also minimising the effects of fatigue in MRAM applications. This work has been applied by Li et al to develop the next generation of highly functional lead-free films for MEMS devices [Li,Tao; Wang,Genshui; Li,Kui; et al. J.Am.Cer Soc.Volume:96(3)].