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Output details

13 - Electrical and Electronic Engineering, Metallurgy and Materials

Glyndŵr University

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Output 14 of 64 in the submission

Article title

Edges in CNC polishing: from mirror-segments towards semiconductors, paper 1: edges on processing the global surface

Type

D - Journal article

DOI

10.1364/OE.20.019787

Title of journal

Optics Express

Article number

Volume number

Issue number

First page of article

19787

ISSN of journal

1094-4087

Year of publication

2012

URL

Number of additional authors

Additional information

This research was part of a wider thrust supporting the world’s largest optical telescope project – the 39m European Extremely Large Telescope. The primary mirror will comprise 798 mirror segments each of 1.45 meters. The control of segment edge profiles is one of the key technical challenges, as rolled edges directly compromise signal-to-noise ratio on science objectives such as detecting extra-solar planets. This paper focusses on edge-metrology - a particular challenge as edge-defects are often invisible in interferometric testing. Edge-control is now finding application for polishing photomasks for semiconductor manufacture out to the extreme edge

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract