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Comparison of Ti-Zr-V nonevaporable getter films deposited using alloy or twisted wire sputter-targets

This paper resulted from funded collaboration with STFC staff at Daresbury( CCLRC (Council for the Central Lab of the Res Councils) : Contract Number 4162363) who are co-authors. Production of extremely low pressure in vacuum systems is a key element of modern materials activity (e.g ion implantation, fusion and synchrotron radiation analysis). A critical component in pumping such systems is a special alloy coating which pumps residual gases. This study has shown that such coatings can be produced which allow these pumping surfaces to be regenerated using much lower temperatures. The new coatings require less energy to regenerate the pumping surface and the lower temperature means that the risk of system leaks is minimised.