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Output details

15 - General Engineering

University of Huddersfield

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Output 105 of 121 in the submission

Article title

Surface and thickness measurement of a transparent film using wavelength scanning interferometry

Type

D - Journal article

DOI

10.1364/OE.20.021450

Title of journal

Optics Express

Article number

Volume number

Issue number

First page of article

21450

ISSN of journal

1094-4087

Year of publication

2012

URL

http://dx.doi.org/10.1364/OE.20.021450

Number of additional authors

Additional information

In this paper a wavelength scanning interferometer for measuring the surface and thickness of a transparent film has been reported. This paper represents a method that can effectively separate the interference signals between the different surfaces of the films was presented. A high quality publication of the author it was published on Optical Express. This research extended the applications of wavelength scanning interferometry from surface measurement to inspection into film thickness measurement. It paved in for the new EPSRC project EP/K007068/1(PI Gao) It has additionally become a part of fundamental impact element of the FP7 project NanoMend NMP4-LA-2011-280518(PI Blunt)

Interdisciplinary

Yes

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract