Output details
15 - General Engineering
University of Huddersfield
Article title
Surface Measurement Errors using Commercial Scanning White Light Interferometers
Type
D - Journal article
Title of journal
Measurement Science and Technology
Article number
-
Volume number
19
Issue number
1
First page of article
015303
ISSN of journal
0957-0233
Year of publication
2008
Number of additional authors
3
Additional information
This paper has become one of the most cited papers (67 times since 2008) in the field of surface metrology in recent years. It reported systematic errors that are observed when the surface gradient is considerably smaller and which initial the discovery of the physics limitation of the scanning white light interferometry and attracted more researches in this research topic. This approach to understanding high sloped surface has led to research being initiated at NPL and has impacted directly into the FP7 project NanoMend NMP4-LA-2011-280518(PI Blunt), concerning in-process metrology and repair for large substrate area structured surfaces.
Interdisciplinary
-
Cross-referral requested
-
Research group
None
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-
