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Output details

9 - Physics

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Article title

Medium energy ion scattering analysis of the evolution and annealing of damage and associated dopant redistribution of ultra shallow implants in Si

Type

D - Journal article

DOI

Title of journal

Radiation Effects and Defects in Solids

Article number

Volume number

164

Issue number

7-8

First page of article

481

ISSN of journal

1042-0150

Year of publication

2009

URL

Number of additional authors

Additional information

Interdisciplinary

Cross-referral requested

Research group

B - The Condensed Matter and Materials Physics Group

Citation count

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract