You are in : Home » Results & submissions » Select UOA » 13 - Electrical and Electronic Engineering, Metallurgy and Materials » View submission: Bangor University » Outputs » Detail

Output details

13 - Electrical and Electronic Engineering, Metallurgy and Materials

Bangor University

Return to search Previous output Next output

Output 0 of 0 in the submission

Article title

Robustness of RF MEMS Capacitive Switches With Molybdenum Membranes

Type

D - Journal article

DOI

10.1109/TMTT.2009.2033885

Title of journal

IEEE Transactions on Microwave Theory and Techniques

Article number

Volume number

Issue number

First page of article

3262

ISSN of journal

1557-9670

Year of publication

2009

URL

Number of additional authors

Additional information

This article reports the first utilization of a refractive metal as the mechanical membrane material of a RF MEMS capacitive switch. The measured performance shows enhancement of the overall thermal stability with respect to ambient temperature variations due to proper thermal match between substrate and suspended membrane. This work helped MEMtronics Corp. (USA) gain of order $ 3M funding on extensions of DARPA contracts HR001-06-1-0046 and N66001-10-1-4006 ( 2010- 2013).

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract