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13 - Electrical and Electronic Engineering, Metallurgy and Materials

Sheffield Hallam University

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Article title

Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering

Type

D - Journal article

DOI

10.1116/1.2839855

Title of journal

Journal of Vacuum Science & Technology A

Article number

Volume number

Issue number

First page of article

288

ISSN of journal

0734-2101

Year of publication

2008

URL

http://shura.shu.ac.uk/1141/

Number of additional authors

Additional information

This EPSRC-funded (EP/D049202/1) work describes the application of recently developed HIPIMS technology used to deposit CrN/NbN multilayer coatings, focusing on the link between highly ionised dense plasmas and the superior properties exhibited by combined HIPIMS and UBM technology over that of the conventional technologies. A range of advanced analytical techniques such as plasma diagnosis, TEM, SEM and XRD was used to prove this enhancement of properties such as low friction, high wear resistance and corrosion resistance. This work is expected to present a new horizon to a range of applications where high wear and corrosion resistance is required.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract