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13 - Electrical and Electronic Engineering, Metallurgy and Materials

University of Southampton

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Article title

Focused helium ion beam milling and deposition

Type

D - Journal article

DOI

10.1016/j.mee.2010.11.041

Title of journal

Microelectronic Engineering

Article number

Volume number

Issue number

First page of article

2452

ISSN of journal

0167-9317

Year of publication

2011

URL

http://www.eprints.soton.ac.uk/271713

Number of additional authors

Additional information

Significance of output:

This paper established that the new He+ based Zeiss ‘Orion’ microscope can be used as a novel nanofabrication system. Our’s was the first in the world to be fully equipped in clean room conditions, representing a major technical challenge. Imaging resolution to 0.3nm was retained, whilst graphene milling and platinum and tungsten contact-forming deposition were demonstrated. Graphene milling results are much better than those from traditional Ga:FIB instruments and the techniques we have described led to devices with world record on/off ratios. Use of He+ beams is now rapidly expanding with ~15 installed and additional manufacturers entering the field.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract