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13 - Electrical and Electronic Engineering, Metallurgy and Materials

University of Southampton

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Article title

Fabrication of MEMS components using ultra fine grained aluminium

Type

D - Journal article

DOI

10.1088/0960-1317/20/4/045029

Title of journal

Journal of Micromechanics and Microengineering

Article number

Volume number

Issue number

First page of article

045029

ISSN of journal

0960-1317

Year of publication

2010

URL

http://www.eprints.soton.ac.uk/270883

Number of additional authors

Additional information

Significance of output:

This paper describes a process for the fabrication of microelectromechanical systems (MEMS) using a novel embossing process, that produces features with dimensions smaller than 10 µm and high thermal conductivity. The hot embossing process (at 300C) allowed a reduced embossing force to be used and the microdevices thereby produced demonstrated the utility of the approach.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract