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12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering

Cranfield University

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Article title

A method to quantify the degree of uniformity of thickness of thin films

Type

D - Journal article

DOI

10.1016/j.tsf.2008.05.001

Title of journal

Thin Solid Films

Article number

Volume number

516

Issue number

First page of article

8493

ISSN of journal

0040-6090

Year of publication

2008

URL

Number of additional authors

Additional information

This work was completed under EPSRC funded First Grant (GR/S74171). The paper details a quick and cheap method for monitoring the uniformity of semi-transparent films.

Interdisciplinary

Cross-referral requested

Research group

F - Structures and Machine Systems

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract