Output details
13 - Electrical and Electronic Engineering, Metallurgy and Materials
University of Plymouth
The properties of epitaxial PMNT thin films grown on SrTiO3 substrates
Optimizing the d33 coefficient in piezoelectric thin films is vital in the design of MEMS and NEMS devices. We showed that using conducting oxides as electrodes significantly increases this coefficient in a previous publication (R.Herdier et al, J. of Crystal Growth,Vol.310,Issue14,1stJuly 2008,P.3299-3302). This paper reports on developing devices with films epitaxially grown on single crystal substrates of STO, and compares the functionality with the same films on silicon substrates. The actuation capability was increased by 50%, as was the dielectric constant, without compromising polarisation properties. Such devices are useful for both MEMS applications and memory devices, such as FRAM.
