For the current REF see the REF 2021 website REF 2021 logo

Output details

15 - General Engineering

Manchester Metropolitan University

Return to search Previous output Next output
Output 41 of 65 in the submission
Article title

Measurements of Deposition Rate and Substrate Heating in a HiPIMS Discharge

Type
D - Journal article
Title of journal
Plasma Processes and Polymers
Article number
-
Volume number
6
Issue number
S1
First page of article
S543
ISSN of journal
16128850
Year of publication
2009
URL
-
Number of additional authors
2
Additional information

A collaboration between internationally leading groups in Physical Vapour Deposition, and plasma physics, and the first publication to demonstrate a significant reduction in substrate heat loading during HiPIMS deposition - a technique at the forefront of physical vapour deposition research; and to suggest application to thermally sensitive substrates (ie. polymer web). Deposition of high quality functional films onto polymer web would open up a major sector for commercialisation. Subsequent research projects followed this finding, including a £750k EPSRC grant EP/F003951/1 between MMU, Liverpool and Oxford Universities, to study the deposition of functional coatings onto polymeric web; and research consultancies.

Interdisciplinary
-
Cross-referral requested
-
Research group
A - The Surface Engineering and Advanced Materials Group
Proposed double-weighted
No
Double-weighted statement
-
Reserve for a double-weighted output
No
Non-English
No
English abstract
-