Output details
15 - General Engineering
University of Huddersfield
Rapid phase shifting fiber interferometer with optical stylus
This paper describes new advances in the operation fibre interferometery for the measurement of surface topography. It builds upon previous work reported in Appl. Opt., 47(7), pp.888-863 by improving the active vibration compensation unit to use real-time phase information. This resulted in a system that was much more robust against vibration and the effects of polarisation evolution. The work was funded under ERC AdG 117228-Surfund and has led to a patent WO2007144654. This fundamental work contributed to the successful application: EPSRC Centre for Innovative Manufacturing in Advanced Metrology(EP/I033424/1) and will form the basis for metrology applications in industry.