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15 - General Engineering

University of Huddersfield

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Article title

Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise

Type

D - Journal article

DOI

10.1364/AO.49.002903

Title of journal

Applied Optics

Article number

Volume number

Issue number

First page of article

2903

ISSN of journal

1559-128X

Year of publication

2010

URL

http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-49-15-2903

Number of additional authors

Additional information

This paper introduces a novel optical interferometry system with self-calibration for fast full-field measurement of micro and nano-scale surfaces (both smooth and with large aspect ratios). The system can be used for on-line/in-process/in-situ measurement on the shop floor. The project is sponsored by EPSRC grant EP/I033491/1. A patent WO2010/082066 was issued; three prototype instruments developed and will be applied to Catapult CPI photo-voltaics manufacturing-system and the NPL national measurement system. A PhD degree resulted from this research and the candidate awarded one of the five Postgraduate Awards 2012 by the Worshipful Company of Scientific Instrument Makers.

Interdisciplinary

Cross-referral requested

Research group

None

Proposed double-weighted

Double-weighted statement

Reserve for a double-weighted output

Non-English

English abstract