Output details
15 - General Engineering
University of Huddersfield
In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry
This paper is the conclusion of a four years EPSRC research, EPE0237111-UPS2-03 (PI X. Jiang) project in the field of in-process surface measurement using wavelength scanning interferometry. It has become a part of fundamental impact element of the FP7 project NanoMend NMP4-LA-2011-280518(PI L Blunt) where the technique is being commercialised. In this paper a wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces, immune to environmental noise is introduced. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process.