Output details

Measurements of dimensional standards and etalons with feature size from tens of micrometres to millimetres by using sensor strengthened nanomeasuring machine

This output fulfilled several research needs on micro-metrology methodologies and instrumentations for the measurement of 3D form, positions and surface roughness etc., based on image processing & vision inspection, micro-sensor and nano-measuring machine (NMM). The work was funded via internal funding of the t national measurement laboratory PTB (Germany). The project behind this paper was to fully use the whole measuring range of NMM to calibrate aspherical artifacts which were single point diamond turned with nanoscale form accuracy. These artifacts form the basis of transfer standards used in the ultra precision manufacturing industry.