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12 - Aeronautical, Mechanical, Chemical and Manufacturing Engineering
Newcastle University
Dynamic characterization of MEMS using Raman spectroscopy
This paper presents a novel approach to characterising the motion of Raman active micro and nano mechanical vibratory structures, which, uniquely, has the capability of characterising in-plane motion without the requirement to map surface features. The work was performed as part of EPSRC project “Development of a Dynamic Micro Analysis Raman Spectroscopy (DyMARS) System for characterisation of MEMS and NEMS” (EP/C015045/1), and has led directly to further EPSRC support for the purchase of an ultra-high frequency laser vibrometer (two linked awards: EP/K022679/1 and EP/L001268/1), in order to continue to develop processes for leading edge MEMS and NEMS characterisation.